Accommodation of nonstoichiometry in (100) fiber-textured (BaxSr1-x)Ti1-yO3+z thin films grown by chemical vapor deposition

被引：40

作者：

Stemmer, S ^{[1
]}

Streiffer, SK

Browning, ND

Kingon, AI

机构：

[1] Univ Illinois, Dept Phys, Chicago, IL 60607 USA

[2] Argonne Natl Lab, Div Mat Sci, Argonne, IL 60439 USA

[3] N Carolina State Univ, Raleigh, NC 27695 USA

来源：

APPLIED PHYSICS LETTERS | 1999年 / 74卷 / 17期

关键词：

D O I：

10.1063/1.123871

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We have investigated the microstructural accommodation of nonstoichiometry in (BaxSr1-x)Ti1+yO3+z thin films grown by chemical vapor deposition. Films with y=0.04 and y=0.15 were studied by high-spatial resolution electron energy-loss spectroscopy, revealing changes in chemistry and local atomic environment both at grain boundaries and within grains as a function of titanium content. We find that excess titanium in the samples with y=0.15 segregates to the grain boundaries in addition to being partially accommodated in the grain interior. (C) 1999 American Institute of Physics. [S0003-6951(99)02217-2].

引用

页码：2432 / 2434

页数：3

共 24 条

[1]

Basceri C, 1998, MATER RES SOC SYMP P, V493, P9

[2] The dielectric response as a function of temperature and film thickness of fiber-textured (Ba,Sr)TiO3 thin films grown by chemical vapor deposition [J].