Properties of NdBa2Cu3O7-delta thin film prepared by off-axis rf sputtering

被引：23

作者：

Kim, IS

Lee, KW

Park, YK

Park, JC

机构：

[1] Superconductivity Research Group, Korea Research Institute of Standards and Science, Yusong, Taejon 305-600

来源：

APPLIED PHYSICS LETTERS | 1996年 / 68卷 / 13期

关键词：

D O I：

10.1063/1.116037

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Thin films of NdBa2Cu3O7-delta(NdBCO) were fabricated on SrTiO3 substrates by an off-axis rf sputtering. Disk shaped targets of 5 cm in diameter were prepared with stoichiometric composition of NdBCO by sintering at 1273 K in air. The sintered body was single phase and exhibited T-c(R=0)= 92 K The effects of several deposition parameters on the superconducting NdBCO thin films, e.g., gas pressure, substrate temperature, oxygen annealing process, and rf power were studied. The x-ray diffraction pattern showed the deposited thin films were highly c-axis oriented without any impurity phase. Thin films with T-c(R=0)=87 K could be obtained reproducibly at optimized conditions. Critical current density (J(c)) of the patterned thin film was 10(6)-10(7) A/cm(2) at low temperature. (C) 1996 American Institute of Physics.

引用

页码：1859 / 1861

页数：3

共 12 条

[1] HIGH-QUALITY C-AXIS ORIENTED SUPERCONDUCTING ND1+XBA2-XCU3O7-D THIN-FILMS DEPOSITED BY THE LASER-ABLATION METHOD [J].