High sensitivity ethanol gas sensor integrated with a solid-state heater and thermal isolation improvement structure for legal drink-drive limit detecting

被引:64
作者
Ho, JJ
Fang, YK
Wu, KH
Hsieh, WT
Chen, CH
Chen, GS
Ju, MS
Lin, JJ
Hwang, SB
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, VLSI Technol Lab, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Mech Engn, Man Machine Lab, Tainan 70101, Taiwan
[3] Fortune Jr Coll Technol & Commerce, Dept Elect Engn, Kaohsiung, Taiwan
[4] Chien Kuo Jr Coll Technol & Commerce, Dept Elect Engn, Chung Hua, Taiwan
关键词
ethanol gas sensor; tin-dioxide; MEMS technology; array integration;
D O I
10.1016/S0925-4005(98)00240-8
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
The paper reports the successful fabrication of ethanol gas sensors with tin-dioxide (SnO2) thin films integrated with a solid-state heater, which is realized with technologies of micro-electro-mechanical systems (MEMS), and are compatible with VLSI processes. The main sensing part with dimensions of 450 x 400 mu m(2) in this developed device is composed of a sensing SnO2 film, which is fabricated by electron-gun evaporation with proper annealing in ambient oxygen gas to yield fine particles and good structure. An integrated solid-state heater with a 4.5 mu m-thick cantilever bridge (1000 x 500 mu m(2)) structure is made of silicon carbide (SiC) material by MEMS technologies. The sensitivity for 1000 ppm ethanol gas reaches as high as 90 with 10 s and 2 min for the response and recovery time, respectively, at an operating temperature of 300 degrees C. Those experimental results also exhibit a much superior performance to that of a popular commercial ethanol gas sensor TGS-822. Therefore, the developed sensor with high performance is a good candidate for some specific application in automobile to detect drink-drive limit and allows an array integration available with various films for controlling each element at separate resistance. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:227 / 233
页数:7
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