Fabrication of diffractive optical elements on-fiber for photonic applications by nanolitography

被引:10
作者
Prasciolu, M
Candeloro, P
Kumar, R
Businaro, L
Di Fabrizio, E
Cojoc, D
Cabrini, S
Liberale, C
Degiorgio, V
机构
[1] INFM, TASC, Natl Nanotechnol Lab, LILIT Beamline, I-34012 Trieste, Italy
[2] Elettra Synchrotron Light Source, I-34012 Trieste, Italy
[3] Politehn Univ Bucharest, Optoelect Res Ctr, Bucharest, Romania
[4] Univ Pavia, Dipartimento Elettr, I-27100 Pavia, Italy
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2003年 / 42卷 / 6B期
关键词
diffractive optical elements; fiber-waveguide coupling; phase diffractive elements; e-beam lithography;
D O I
10.1143/JJAP.42.4177
中图分类号
O59 [应用物理学];
学科分类号
摘要
The present research work is devoted to the realisation of efficient fiber-wave-guide optical coupling between single-mode fiber and rectangular wave guide by fabricating a multilevel diffractive phase element on the top of the fiber by nanolitography. This optical arrangement is able to redistribute the diffractive electromagnetic field on a selected area by a suitable phase modulation of the light, in analogy with what happens for Fresnel Zone Plates Lens. The design of diffractive optical elements has been realized using our own algorthim and code. The out-coming laser beam exiting from the fiber has a gaussian transversal field in contrast to single-mode wave-guide which has an asymmetric transversal field distribution in X and Y direction. Phase modulation has been accomplished by multilevel profiling a polymeric material coated on the top of the fiber by means of a specific fabrication process including e-beam lithography and chemical etching. Focalization experiments for a fiber-waveguide coupling with a 20 microns diameter diffractive element were made with the use of 1550 nm wavelength laser are also discussed.
引用
收藏
页码:4177 / 4180
页数:4
相关论文
共 6 条
[1]
Design and fabrication of diffractive optical elements for optical tweezer arrays by means of e-beam lithography [J].
Cojoc, D ;
Di Fabrizio, E ;
Businaro, L ;
Cabrini, S ;
Romanato, F ;
Vaccari, L ;
Altissimo, M .
MICROELECTRONIC ENGINEERING, 2002, 61-2 :963-969
[2]
One step electron-beam lithography for multipurpose, diffractive optical elements with 200 nm resolution [J].
DiFabrizio, E ;
Grella, L ;
Baciocchi, M ;
Gentili, M ;
Peschiaroli, D ;
Mastrogiacomo, L ;
Maggiora, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06) :3855-3859
[3]
INVESTIGATION OF COMPUTER-GENERATED DIFFRACTIVE BEAM SHAPERS FOR FLATTENING OF SINGLE-MODAL CO2-LASER BEAMS [J].
DUPARRE, M ;
GOLUB, MA ;
LUDGE, B ;
PAVELYEV, VS ;
SOIFER, VA ;
USPIENIEV, GV ;
VOLOTOVSKII, SG .
APPLIED OPTICS, 1995, 34 (14) :2489-2497
[4]
Herzig H.P., 1997, Micro-optics: Elements, Systems, and Applications
[5]
Fabrication of semi-continuous profile diffractive optical elements for beam shaping by electron beam lithography [J].
Nottola, A ;
Gerardino, A ;
Gentili, M ;
Di Fabrizio, E ;
Cabrini, S ;
Melpignano, P ;
Rotaris, G .
MICROELECTRONIC ENGINEERING, 2000, 53 (1-4) :325-328
[6]
DIFFRACTIVE OPTICAL-ELEMENTS - ITERATIVE CALCULATION OF QUANTIZED, BLAZED PHASE STRUCTURES [J].
WYROWSKI, F .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1990, 7 (06) :961-969