Recent advances in the study of electrochemical micromachining

被引：23

作者：

Datta, M

Shenoy, RV

Romankiw, LT

机构：

[1] BM Corporation, T. J. Watson Research Center, Yorktown Heights, NY

来源：

JOURNAL OF ENGINEERING FOR INDUSTRY-TRANSACTIONS OF THE ASME | 1996年 / 118卷 / 01期

关键词：

D O I：

10.1115/1.2803644

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

The present paper reviews some fundamental aspects related to the understanding of the high rate anodic dissolution processes and their influence on thin film patterning by electrochemical micromachining. The role of convective mass transport and current distribution on the surface finish and shape evolution is discussed. Several examples of the applications of maskless and through-mask electrochemical micromachining are presented.

引用

页码：29 / 36

页数：8

共 33 条

[1] THE ROLE OF MASS-TRANSPORT ON ANISOTROPIC ELECTROCHEMICAL PATTERN ETCHING [J].