Directed Self-Assembly at the 10 nm Scale by Using Capillary Force-Induced Nanocohesion

被引：118

作者：

Duan, Huigao ^{[1
,2
]}

Berggren, Karl K. ^{[1
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[2] Lanzhou Univ, Sch Phys Sci & Technol, Lanzhou 730000, Gansu, Peoples R China

来源：

NANO LETTERS | 2010年 / 10卷 / 09期

关键词：

Capillary force; self-assembly; nanocohesion; electron-beam lithography; 10-nm-scale; ARRAYS; FABRICATION; SILICON; SURFACE; HAIR;

D O I：

10.1021/nl102259s

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We demonstrated a new nanoassembly strategy based on capillary force-induced cohesion of high-aspect ratio nanostructures made by electron-beam lithography. Using this strategy, ordered complex pattern were fabricated from individual nanostructures at the 10 nm length scale. This method enables the formation of complex designed networks from a sparse array of nanostructures, suggesting a number of potential applications in fabrication, of nanodevices, nanopatterning, and fluid-flow investigations.

引用

页码：3710 / 3716

页数：7

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