High performance accelerometer based on CMOS technologies with low cost add-ons

被引：7

作者：

Brandl, M

Kempe, V

机构：

来源：

14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2001年

关键词：

D O I：

10.1109/MEMSYS.2001.906465

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Austria Mikro Systeme International has developed a high performance, one axis accelerometer with capacitive readout for the automotive sensor market. The full-scale range is customizable from Ig to 200g. The novel sensor concept combines the advantages of monolithic and hybrid concepts and focuses on mature, high yield / low cost batch fabrication process modules. Industrialization and performance capabilities of the sensor concept have been demonstrated.

引用

页码：6 / 9

页数：2