Fabrication of band-gap structures in planar nonlinear waveguides for second harmonic generation

被引：25

作者：

Foglietti, V

Cianci, E

Pezzetta, D

Sibilia, C

Marangoni, M

Osellame, R

Ramponi, R

机构：

[1] CNR, Ist Foton & Nanotecnol, I-00156 Rome, Italy

[2] Univ Roma La Sapienza, INFM, Dipartimento Energet, I-00161 Rome, Italy

[3] CNR, INFM, Dipartimento Fis Politecn Milano, I-20133 Milan, Italy

[4] CNR, Ist Foton & Nanotechnol, I-20133 Milan, Italy

来源：

MICROELECTRONIC ENGINEERING | 2003年 / 67-8卷

关键词：

nonlinear optics; e-beam lithography;

D O I：

10.1016/S0167-9317(03)00176-X

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The work presented here deals with the design and fabrication of the linear grating on a LiNbO3 planar waveguide to obtain an efficient second harmonic generation operating in Cerenkov configuration. The lithium niobate is a nonlinear material particularly suitable for photonic applications where the waveguide can be efficiently fabricated by means of proton exchange. The grating pattern, with a period of 350 nm, covers a square of 1.5-mm sides. The pattern has been fabricated by means of electron beam lithography and reactive ion etching. (C) 2003 Elsevier Science B.V. All rights reserved.

引用

页码：742 / 748

页数：7

共 5 条

[1] HYBRID MODES IN PROTON-EXCHANGED WAVE-GUIDES REALIZED IN LINBO3, AND THEIR DEPENDENCE ON FABRICATION PARAMETERS [J].