Electro-optical characteristics of indium tin oxide (ITO) films: Effect of thermal annealing

被引：12

作者：

Morgan, DV

Salehi, A

Aliyu, YH

Bunce, RW

机构：

[1] Sch. Elec., Electronics Syst. Eng., Univ. of Wales College of Cardiff, Cardiff CF21 IXH

来源：

RENEWABLE ENERGY | 1996年 / 7卷 / 02期

关键词：

D O I：

10.1016/0960-1481(95)00131-X

中图分类号：

X [环境科学、安全科学];

学科分类号：

08 ; 0830 ;

摘要：

The effect of thermal annealing on the electrical and optical characteristics of ITO films prepared by reactive sputtering and thermal evaporation have been studied. The effect of the thermal annealing is to improve the conductivity and the optical transmission in the shorter wavelength region. The conductivity of the films increases with annealing temperature, this behaviour is associated with grain growth in the film. (C) 1996 Elsevier Science Ltd.

引用

页码：205 / 208

页数：4

共 5 条

[1]

CHOPRA KL, 1983, THIN SOLID FILMS, V1, P102

[2] PREPARATION AND PHYSICAL-PROPERTIES OF TRANSPARENT CONDUCTING OXIDE-FILMS [J].

JARZEBSKI, ZM .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1982, 71 (01) :13-41

[3] POSTDEPOSITION ANNEALING EFFECTS IN RF REACTIVE MAGNETRON SPUTTERED INDIUM TIN OXIDE THIN-FILMS [J].

MARTINEZ, MA ;

HERRERO, J ;

GUTIERREZ, MT .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1992, 26 (04) :309-321

[4]

MORGAN DV, 1982, PHYS STATUS SOLIDI A, V71, P13

[5]

SALEHI A, THESIS U WALES

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