Infrared analysis of deuterated carbon-nitrogen films obtained by dual-ion-beam-assisted-deposition

被引:61
作者
Alvarez, F [1 ]
Victoria, NM [1 ]
Hammer, P [1 ]
Freire, FL [1 ]
dos Santos, MC [1 ]
机构
[1] Univ Estadual Campinas, UNICAMP, Inst Fis Gleb Wataghin, BR-13083970 Sao Paulo, Brazil
关键词
D O I
10.1063/1.122115
中图分类号
O59 [应用物理学];
学科分类号
摘要
The isotopic effect on the infrared spectra is used to determine the existence of nitrogen-hydrogen bonds in amorphous carbon-nitrogen alloys (a-CNx) prepared by dual-ion-beam-assisted deposition. The deuteration experiments and the evolution of the infrared spectra upon atmospheric exposure show that hydroxyls are incorporated from atmospheric moisture. (C) 1998 American Institute of Physics. [S0003-6951(98)02334-1].
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页码:1065 / 1067
页数:3
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