Loss-less multilevel crossing of busline waveguide in vertically coupled microring resonator filter

被引:26
作者
Hatakeyama, Y [1 ]
Hanai, T [1 ]
Suzuki, S [1 ]
Kokubun, Y [1 ]
机构
[1] Yokohama Natl Univ, Grad Sch Engn, Dept Phys Elect & Comp Engn, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan
关键词
integrated optics; microresonators; optical waveguides; optical waveguide filters; scattering; wavelength division multiplexing;
D O I
10.1109/LPT.2003.822229
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
To eliminate the sattering loss at the crossing points of cross grid busline waveguides, a multilevel crossing structure of busline waveguide was introduced into the vertically coupled microring resonator filter. The top surface of each buried waveguide was perfectly planarized by a new fabrication process and clear filter responses were observed for a single ring and a series coupled double ring resonator with multilevel crossing busline waveguides.
引用
收藏
页码:473 / 475
页数:3
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