High rate deposition of ta-C:H using an electron cyclotron wave resonance plasma source

被引：55

作者：

Morrison, NA ^{[1
]}

Rodil, SE ^{[1
]}

Ferrari, AC ^{[1
]}

Robertson, J ^{[1
]}

Milne, WI ^{[1
]}

机构：

[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England

来源：

THIN SOLID FILMS | 1999年 / 337卷 / 1-2期

关键词：

electron cyclotron wave resonance; tetrahedral amorphous carbon; high rate deposition;

D O I：

10.1016/S0040-6090(98)01187-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A compact electron cyclotron wave resonance (ECWR) source has been developed for the high rate deposition of hydrogenated tetrahedral amorphous carbon (ta-C:H). The ECWR provides growth rates of up to 1.5 nm/s over a 4-inch diameter and an independent control of the deposition rate and ion energy. The ta-C:H was deposited using acetylene as the sourer gas and was characterized as having an sp(3) content of up to 77%, plasmon energy of 27 eV, refractive index of 2.45, hydrogen content of about 30%, optical gap of up to 2.1 eV and RMS surface roughness of 0.04 nm. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：71 / 73

页数：3

共 8 条

[1] PROPERTIES OF FILTERED-ION-BEAM-DEPOSITED DIAMOND-LIKE CARBON AS A FUNCTION OF ION ENERGY [J].

FALLON, PJ ;

VEERASAMY, VS ;

DAVIS, CA ;

ROBERTSON, J ;

AMARATUNGA, GAJ ;

MILNE, WI ;

KOSKINEN, J .

PHYSICAL REVIEW B, 1993, 48 (07) :4777-4782

[2] OUTLOOK FOR MAINTAINING AREAL DENSITY GROWTH-RATE IN MAGNETIC RECORDING [J].

GROCHOWSKI, E ;

THOMPSON, DA .

IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) :3797-3800

[3]

LIEBERMAN MA, 1994, PRINCIPLES PLASMA DI

[4] Systematic variation of the Raman spectra of DLC films as a function of sp(2):sp(3) composition [J].

Prawer, S ;

Nugent, KW ;

Lifshitz, Y ;

Lempert, GD ;

Grossman, E ;

Kulik, J ;

Avigal, I ;

Kalish, R .

[5] Effects of deposition temperature on the properties of hydrogenated tetrahedral amorphous carbon [J].

Sattel, S ;

Robertson, J ;

Ehrhardt, H .

JOURNAL OF APPLIED PHYSICS, 1997, 82 (09) :4566-4576

[6]

TAMER MA, 1994, J APPL PHYS, V76, P3823

[7] Preparation and properties of highly tetrahedral hydrogenated amorphous carbon [J].

Weiler, M ;

Sattel, S ;

Giessen, T ;

Jung, K ;

Ehrhardt, H ;

Veerasamy, VS ;

Robertson, J .

PHYSICAL REVIEW B, 1996, 53 (03) :1594-1608

[8] Mechanical properties and Raman spectra of tetrahedral amorphous carbon films with high sp(3) fraction deposited using a filtered cathodic arc [J].

Xu, S ;

Flynn, D ;

Tay, BK ;

Prawer, S ;

Nugent, KW ;

Silva, SRP ;

Lifshitz, Y ;

Milne, WI .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1997, 76 (03) :351-361

← 1 →