High-temperature semiconductor gas sensors

In this work, the sensitivity of three sensor materials (SrTiO3, CeO2, Ga2O3) for acetone was studied in the 25-850 degreesC temperature range, by a Quadrupole Mass Spectrometer coupled DC sensor tester, planned and built in our laboratory. This set-up is suitable to measure the sensor resistance and to analyse the surrounding gas atmosphere at the same time. The results show that all sensor samples are sensitive to acetone and they have a material-dependent sensitivity maximum as a function of the temperature. The highest sensitivity was obtained for Ga2O3, around 550 degreesC. (C) 2001 Elsevier Science Ltd. All rights reserved.