Nanostructuring high resolution phase zone plates in nickel and germanium using cross-linked polymers

被引：4

作者：

Schliebe, T

Schneider, G

Aschoff, H

机构：

[1] Georg-August-Univ. Göttingen, Forschungseinrichtung Rontgenphysik, 37073 Göttingen

来源：

MICROELECTRONIC ENGINEERING | 1996年 / 30卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(95)00298-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

[No abstract available]

引用

页码：513 / 516

页数：4

共 7 条

[1]

ANDERSON EH, 1992, XRAY MICROSCOPY, V3, P75

[2] ELECTRON-BEAM GENERATED PHASE ZONE PLATES WITH 30 NM ZONEWIDTH FOR HIGH-RESOLUTION X-RAY MICROSCOPY [J].

DAVID, C ;

MEDENWALDT, R ;

THIEME, J ;

GUTTMANN, P ;

RUDOLPH, D ;

SCHMAHL, G .

JOURNAL OF OPTICS-NOUVELLE REVUE D OPTIQUE, 1992, 23 (06) :255-258

[3]

DAVID C, 1995, J VAC SCI TECHNOL B

[4]

Emoto F., 1985, Microelectronic Engineering, V3, P17, DOI 10.1016/0167-9317(85)90005-X

[5]

SCHNEIDER G, 1995, J VAC SCI TECHNOL B

[6] HIGH-RESOLUTION GERMANIUM ZONE PLATES AND APERTURES FOR SOFT-X-RAY FOCALOMETRY [J].

TENNANT, DM ;

RAAB, EL ;

BECKER, MM ;

OMALLEY, ML ;

BJORKHOLM, JE ;

EPWORTH, RW .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1990, 8 (06) :1970-1974

[7]

THIEME J, 1995, XRAY MICROSCOPY, V4

← 1 →