Glow discharge around piezoelectric transformer operated under higher-order vibration modes

被引：9

作者：

Itoh, H ^{[1
]}

Teranishi, K ^{[1
]}

Suzuki, S ^{[1
]}

机构：

[1] Chiba Inst Technol, Grad Sch Engn, Chiba 2750016, Japan

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 2005年 / 33卷 / 02期

基金：

日本学术振兴会;

关键词：

glow discharge; higher-order vibration mode; low pressure; nitrogen; piezoelectric transformer;

D O I：

10.1109/TPS.2005.845076

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

We have been developing compact plasma reactors using a piezoelectric transformer (PT). The plasma reactors were operated by three fundamental vibration modes, (1/2) lambda, lambda, and (3/2)lambda-modes according to the general usage of the PT. However, through our experiments, we found that glow discharge appears while driving the PT at higher frequencies than the fundamental vibration modes, which are abnormal for the operations of PT. In such higher-order operations, the glow discharge behaves in diverse and unique profiles. This paper presents some images of low-pressure glow discharge produced by the PT driven in higher-order vibration modes.

引用

页码：352 / 353

页数：2

共 5 条

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[4] Luminous phenomenon of silent discharge using a piezoelectric transformer [J].

Teranishi, K ;

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[5]

TERANISHI K, 2003, P 26 ICPIG, V3, P191

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