An experimental study on iron thin films obtained by laser pyrolysis of iron pentacarbonyl vapour

被引：9

作者：

Cireasa, R

Alexandrescu, R

Voicu, I

Morjan, I

Pugna, G

机构：

[1] Institute of Atomic Physics, Laser Department, Bucharest

来源：

SURFACE & COATINGS TECHNOLOGY | 1996年 / 80卷 / 1-2期

关键词：

laser induced CVD; thin solid films; pyrolysis;

D O I：

10.1016/0257-8972(95)02718-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The results of a study on laser-assisted CVD of iron thin films from Fe(CO)(5) vapour using a CO2 laser are presented. The iron-based layers deposited onto quartz substrates were characterised by different analytical techniques, and the influence of the precursor pressure and laser incident energy on the physical and chemical properties of films was pointed out. It was deduced that the purity of the as-deposited films depends on the different phases of carbon incorporation, which in turn is strongly influenced by the dynamics of the prevaling gas-phase processes.

引用

页码：229 / 232

页数：4

共 11 条

[1]

ALLEN SD, 1988, J APPL PHYS, V54, P1641

[2]

EHRLICH DJ, 1981, J ELECTROCHEM SOC, V128, P2039, DOI 10.1149/1.2127793

[3] MECHANISMS OF LASER INTERACTION WITH METAL-CARBONYLS ADSORBED ON SI(111)7X7 - THERMAL VS PHOTOELECTRONIC EFFECTS [J].