Magnetic nanoelements for magnetoelectronics made by focused-ion-beam milling

被引：64

作者：

Xiong, G ^{[1
]}

Allwood, DA ^{[1
]}

Cooke, MD ^{[1
]}

Cowburn, RP ^{[1
]}

机构：

[1] Univ Durham, Dept Phys, Nanomagnetism Grp, Sci Labs, Durham DH1 3LE, England

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 21期

关键词：

D O I：

10.1063/1.1419032

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Focused-ion-beam (FIB) milling has been used to structure magnetic nanoelements from 5 nm thick films of permalloy. We have used focused 30-keV Ga+ ions to define small arrays (6 mum x 6 mum) of wires, circles, and elongated hexagons in the size range 100-500 nm. High-sensitivity magneto-optical measurements combined with atomic force microscopy show that very high quality magnetic nanostructures can be fabricated by FIB milling even in thin films of soft magnetic materials. This finding could be significant for the future commercialization of certain aspects of magnetic nanotechnology and magnetoelectronics. (C) 2001 American Institute of Physics.

引用

页码：3461 / 3463

页数：3

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