Structure and tribological properties of carbon and carbon nitride films, obtained by the ARC method

被引：17

作者：

Precht, W

Pancielejko, M

Czyzniewski, A

机构：

[1] Tech Univ, Inst Mat Sci & Technol, PL-75620 Koszalin, Poland

[2] Tech Univ, Technol Transfer Ctr, PL-75620 Koszalin, Poland

来源：

VACUUM | 1999年 / 53卷 / 1-2期

关键词：

amorphous carbon; carbon nitrides; ARC PVD; tribology;

D O I：

10.1016/S0042-207X(98)00403-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Carbon and carbon nitrides (CNx) films were obtained by the cathodic are plasma deposition method using a high-purity graphite target, nitrogen and argon as the working atmosphere and bearing steel as a substrate, held at 453 K. The films were analysed using energy-dispersive X-ray analysis and SEM, microindentation tests with FISHERSCOPE, adhesion tests with REVETEST(R) and tribology test with a ball-on-disc method. X-ray diffraction analysis reveal that the carbon and CN, films structure are mainly amorphous (a-C). This result was also confirmed by SEM pictures of fracture cross-section. Maximal microhardnesses of a-C and CNx films were 32 and 36 GPa, respectively. Good adhesion (L-c > 70 N) was obtained using a 0.2 mu m Zr interlayer. The maximum nitrogen concentration of the CNx films was about 23 at%. The coefficient of dry friction against bearing steel is equal to 0.2 for a-C and 0.4 for CNx films. The paper presents investigation results and a discussion of the influence of selected technological parameters on the properties of a-C and CNx films. (C) 1999 Elsevier Science Ltd. All rights reserved.

引用

页码：109 / 112

页数：4

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