Microfabrication of PPy microactuators and other conjugated polymer devices

被引:259
作者
Smela, E [1 ]
机构
[1] Riso Natl Lab, Condensed Matter Phys & Chem Dept, DK-4000 Roskilde, Denmark
基金
美国国家卫生研究院; 美国国家科学基金会;
关键词
D O I
10.1088/0960-1317/9/1/001
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Conjugated polymers have a number of interesting properties that can be exploited in microfabricated sensors and actuators. For example, polypyrrole is a conjugated polymer that can change volume to deliver significant stresses and strains. These materials can be patterned using conventional microfabrication techniques. The procedures for doing this are described in this paper, focusing on the microfabrication of polypyrrole microactuators. in addition, other methods for the deposition and patterning of conjugated polymers are reviewed. A special technique for releasing actuators, differential adhesion, is also detailed.
引用
收藏
页码:1 / 18
页数:18
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