Structural, optical and electrical properties of indium tin oxide thin films prepared by spray pyrolysis

被引：68

作者：

Benamar, E

Rami, M

Messaoudi, C

Sayah, D

Ennaoui, A

机构：

[1] Fac Sci, Phys Mat Lab, Dept Phys, Rabat, Morocco

[2] Hahn Meitner Inst Kernforsch Berlin GmbH, Dept Phys Chem, D-14109 Berlin, Germany

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1999年 / 56卷 / 02期

关键词：

Indian tin oxide; spray pyrolysis; transparent coatings;

D O I：

10.1016/S0927-0248(98)00151-2

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

Spray pyrolysis process has been used to deposit highly transparent and conducting films of tin-doped indium oxide onto glass substrates. The electrical, structural and optical properties have been investigated as a function of various deposition parameters namely dopant concentrations, temperature and nature of substrate. The morphology of the surface as a function of the substrate temperature has been studied using atomic force microscopy. XRD has shown that deposited films are polycrystalline without second phases and have a preferred orientation (4 0 0). Indium tin oxide layers with low resistivity values around 4 x 10(-5) Omega cm and transmission coefficients in the visible and near-infrared range of about 85-90% have been easily obtained. (C) 1999 Elsevier Science B.V. All rights reserved.

引用

页码：125 / 139

页数：15

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