Fabrication of high-spatial-frequency gratings through computer-generated near-field holography

被引：20

作者：

Suleski, TJ ^{[1
]}

Baggett, B ^{[1
]}

Delaney, WF ^{[1
]}

Koehler, C ^{[1
]}

Johnson, EG ^{[1
]}

机构：

[1] Digital Opt Corp, Charlotte, NC 28269 USA

来源：

OPTICS LETTERS | 1999年 / 24卷 / 09期

关键词：

D O I：

10.1364/OL.24.000602

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate an innovative method for fabrication of high-spatial-frequency grating structures. This technique makes use of the near-field diffraction patterns from computer-generated phase holograms for lithographic fabrication of grating structures with periods that are one half that of the phase hologram mask. Linear, rectilinear, and circular gratings were fabricated with this technique. Experimental results from gratings with periods to 0.5 mu m and feature sizes to similar to 0.2 mu m are presented. (C) 1999 Optical Society of America.

引用

页码：602 / 604

页数：3

共 13 条

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