Pd-doped SnO2 thin films deposited by assisted ultrasonic spraying CVD for gas sensing:: selectivity and effect of annealing

被引:54
作者
Briand, D
Labeau, M
Currie, JF
Delabouglise, G
机构
[1] Ecole Natl Super Phys Grenoble, Mat & Genie Phys Lab, UMR 5628, CNRS, F-38402 St Martin Dheres, France
[2] Ecole Polytech, Dept Engn Phys, Lab Integrat Sensors & Actuators, Montreal, PQ H3C 3A7, Canada
关键词
gas sensors; tin oxide; spray pyrolysis; annealing; conductance;
D O I
10.1016/S0925-4005(98)00102-6
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
Polycrystalline Pd-doped SnO2, thin films (0.25-1.75 mu m) have been deposited by spray pyrolysis on silicon nitride substrate heated between 460 and 540 degrees C. The gas sensitivity (S = (G(gas) - G(air))/G(air)) in the steady-state and in a dynamic regime have been evaluated under CO (300 ppm in air), ethanol (100 ppm in air) and methane (1000 ppm in air) as a function of temperature. The thin films synthesised at lower temperature (460-500 degrees C) are the most sensitive to CO according to their smaller crystallite size and higher resistivity. In the steady-state, sensitivities up to 4500 have been obtained for the thinnest films at low working temperature of 100 degrees C. A cross-sensitivity to ethanol and to methane was observed. Annealing under pure air stabilises the microstructure and increases the resistivity in air of the Pd-doped SnO2, thin films, which provides a sensitivity to carbon monoxide 2 to 10 times higher, since the resistance of the films under CO remains unchanged. (C) 1998 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:395 / 402
页数:8
相关论文
共 17 条
[1]  
EGASHIRA M, 1981, J PHYS CHEM-US, V85, P4125, DOI 10.1021/j150626a034
[2]  
GAUTHERON B, 1993, SENSOR ACTUAT B-CHEM, V15, P357
[3]   SNO2 SENSORS - CURRENT STATUS AND FUTURE-PROSPECTS [J].
GOPEL, W ;
SCHIERBAUM, KD .
SENSORS AND ACTUATORS B-CHEMICAL, 1995, 26 (1-3) :1-12
[4]  
GOPEL W, 1993, SENSOR ACTUAT B-CHEM, V17, P377
[5]  
HAZEMANN JL, 1997, 11 EUR C SOL STAT TR
[6]  
HEILAND G, 1982, SENSOR ACTUATOR, V2, P343, DOI 10.1016/0250-6874(81)80055-8
[7]   SURFACE PROCESSES IN THE DETECTION OF REDUCING GASES WITH SNO2-BASED DEVICES [J].
KOHL, D .
SENSORS AND ACTUATORS, 1989, 18 (01) :71-113
[8]   THE ROLE OF NOBLE-METALS IN THE CHEMISTRY OF SOLID-STATE GAS SENSORS [J].
KOHL, D .
SENSORS AND ACTUATORS B-CHEMICAL, 1990, 1 (1-6) :158-165
[9]   SYNTHESIS OF PD-DOPED SNO2 FILMS ON SILICON AND INTERACTION WITH ETHANOL AND CO [J].
LABEAU, M ;
GASKOV, AM ;
GAUTHERO, B ;
SENATEUR, JP .
THIN SOLID FILMS, 1994, 248 (01) :6-11
[10]  
LELY RP, 1997, ELECTR SOC P MICR MI, V2, P188