Transmission characteristics of multilayer structure in the soft x-ray spectral region and its application to the design of quarter-wave plates at 13 and 4.4 nm

被引：9

作者：

Kim, DE ^{[1
]}

Lee, SM ^{[1
]}

Jeon, IJ ^{[1
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Phys, Pohang 790784, South Korea

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1999年 / 17卷 / 02期

关键词：

D O I：

10.1116/1.581599

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The increasing usage of soft x-ray radiations due to the development of synchrotron radiation source and others demands varied optical manipulation in the soft x-ray spectral region. The phase manipulation is important because this leads to the control of the polarization state of a soft x-ray radiation. A new criterion for selecting material pairs for the maximum phase difference between the s and p polarization through a multilayer (ML) structure was proposed and tested theoretically. Transmission characteristics of ideal ML. structures in the soft x-ray spectral region have been studied by simulation. The results have been applied to optimize ML structures for quarter-wave plates at 4.4 and 13 nm. It was found that Rh/Si and Co/K MLs are good candidates for quarter-wave plates at 13 and 4.4 nm, respectively. (C) 1999 American Vacuum Society. [S0734-2101(99)01202-6].

引用

页码：398 / 402

页数：5

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