Broad-band microwave characterization of bilayered materials using a coaxial discontinuity with applications for thin conductive films for microelectronics and material in air-tight cell

被引:20
作者
BelhadjTahar, NE
Meyer, O
FourrierLamer, A
机构
[1] Laboratoire de Dispositifs Infrarouge et Microondes (LDIM-EA253/DSPT4/MESR), Université Pierre et Marie Curie
关键词
bilayered materials; broad-band measurements; coaxial discontinuity; microwave characterization; mode-matching method;
D O I
10.1109/22.557608
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new measurement method of complex permittivity of bilayered materials has been developed using a coaxial discontinuity, The electromagnetic analysis is performed according to the ''mode-matching'' method. The reflection coefficient of the principal transverse electromagnetic (TEM) mode is calculated by matching the fields at the interfaces of the layered material and using the orthogonality properties of modes in cylindrical waveguides. The complex permittivity of several known liquid or solid materials in bilayered structure are measured using this method, The experimental results over a wide frequency band (1 kHz-18 GHz) are consistent with those in previous papers and with dc measurements.
引用
收藏
页码:260 / 267
页数:8
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