Dopant compensation mechanism and leakage current in Pb(Zr-0.52,Ti-0.48) O-3 thin films

被引:23
作者
Barlingay, CK
Dey, SK
机构
[1] ARIZONA STATE UNIV,DEPT CHEM BIO & MAT ENGN,TEMPE,AZ 85287
[2] ARIZONA STATE UNIV,CTR SOLID STATE ELECTR RES,TEMPE,AZ 85287
关键词
niobium; transmission electron microscopy; titanium;
D O I
10.1016/0040-6090(95)06983-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The dopant compensation mechanism in 2-5 mol.% niobium (Nb)-doped Pb(Zr0.52Ti0.48) O-3 (PZT) thin films was studied to obtain single phase compositions. Transmission electron microscopy showed that the Nb-doped composition batched according to the Ti vacancy model, was single phase. This indicated that niobium donors were compensated by titanium vacancies at the B site. The beneficial effect of donors in single phase composition and detrimental effects of grain boundary second phases and accepters on the leakage currents are reported. The single-phase Nb-doped (5%) PZT thin film exhibited a low leakage current of 1 x 10(-7) A cm(-2) at 1.2 MV cm(-1).
引用
收藏
页码:112 / 115
页数:4
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