Improvement of the quality factor of RF integrated inductors by layout optimization

被引：17

作者：

Lopez-Villegas, JM ^{[1
]}

Samitier, J ^{[1
]}

Cane, C ^{[1
]}

Losantos, P ^{[1
]}

机构：

[1] Univ Barcelona, Dept Electron, E-08028 Barcelona, Spain

来源：

1998 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM | 1998年

关键词：

D O I：

10.1109/RFIC.1998.682073

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A systematic method to improve the quality factor of RF integrated inductors is proposed. The method is based on the inductor's layout optimization, and has been successfully applied to the design of square spiral inductors performed using a silicon based MCM technology and silicon micromachining post processing.

引用

页码：169 / 172

页数：4