Crystalline Si films for integrated active-matrix liquid-crystal displays

被引：137

作者：

Im, JS

Sposili, RS

机构：

来源：

MRS BULLETIN | 1996年 / 21卷 / 03期

关键词：

D O I：

10.1557/S0883769400036125

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：39 / 48

页数：10

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