Increasing the performance of silicon microphones by the benefit of a complete system simulation

被引：3

作者：

Brauer, M ^{[1
]}

Dehé, A ^{[1
]}

Füldner, M ^{[1
]}

Laur, R ^{[1
]}

机构：

[1] Univ Bremen, D-2800 Bremen 33, Germany

来源：

MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2004年

关键词：

D O I：

10.1109/MEMS.2004.1290638

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

This paper presents a Spice based model of a silicon microphone system. The model considers the acoustical, the mechanical as well as the electrical behaviour. The simulation results are compared with the measurements to focus on the well understood model. Furthermore, a profit of the model is taken by determining the individual noise sources and their contribution to the total noise. Thus it is possible to calculate performance key parameters like sensitivity, noise or signal-to-noise ratio which are subject to special technology parameters. At last, optimizing these parameters will increase the performance.

引用

页码：528 / 531

页数：4

共 7 条

[1]

BRAUER M, 2003, 9 GMM WORKSH METH WE, P11

[2]

FULDNER M, 2003, 29 DTSCH FACHT AK DA

[3]

MECHANICAL-THERMAL NOISE IN MICROMACHINED ACOUSTIC AND VIBRATION SENSORS [J].