Surface Modification of Pure Titanium by Nitrogen Ion Implantation at Different Beam Energy and Dose

The implantation of nitrogen ion is one of the important techniques for modifying the surface characteristics to improve wear and corrosion resistance of commercially pure (cp) Titanium. Although nitrogen ions implanted titanium in various dose demonstrated significant changes of the wear and corrosion resistance, the variable energy implanted is still not yet fully studied. Nitrogen ions were implanted in cp Titanium surface with varies of both dose of 0.5; 1.0 and 2.0 x 10(17) ions cm(-2) and energy of 80, 100 and 115 keV. The nitrogen ion implanted cp Titanium demonstrated an increase in the surface hardness and improvement in corrosion behavior. The maximum surface hardness was delivered by the specimens implanted with the dose of 2.0 x 10(17) ions cm(-2) at energy of 80 keV. Grazing incidence x-ray diffraction studies indicated that TiN phase was formed on near surface substrate. Electrochemical tests in 3.5%-wt NaCl solution depicted significant improvements in corrosion resistance for specimens implanted with dose of 0.5 x 10(17) and 1.0 x 10(17) ions cm(-2) at energy of 80 keV, dose of 1.0 x 10(17) and 2.0 x 10(17) ions cm(-2) at energy of 100 keV. The dose of 2.0 x 10(17) ions cm(-2) and energy of 100 were the best implantation parameter in this study.