Co-Zr-O nano-granular thin films with improved high frequency soft magnetic properties

被引：100

作者：

Ohnuma, S ^{[1
]}

Lee, HJ ^{[1
]}

Kobayashi, N ^{[1
]}

Fujimori, H ^{[1
]}

Masumoto, T ^{[1
]}

机构：

[1] Res Inst Elect & Magnet Mat, Sendai, Miyagi 9820807, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2001年 / 37卷 / 04期

基金：

日本学术振兴会;

关键词：

Co-Zr-O; high frequency; soft magnetic property;

D O I：

10.1109/20.951139

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A study was made of the properties and structure of Co-Zr-O nano-granular films prepared by rf reactive sputtering in an atmosphere of argon and oxygen gases. We found soft magnetic Co-Zr-O films in a wide compositional range near Co-ZrO2 and investigated systematically the compositional dependence of their magnetic properties and electrical resistivity. The films near Co60Zr10O30 simultaneously have anisotropy fields more than 150 Oe, coercivities less than 3 Oe, saturation magnetizations more than 9 kG, and electrical resistivities more than 1000 mu Ohm cm. The frequency response of permeability of these films is excellent, and they show a high resonance frequency exceeding 3 GHz.

引用

页码：2251 / 2254

页数：4

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