Thin film supercapacitors using a sputtered RuO2 electrode

被引：68

作者：

Lim, JH ^{[1
]}

Choi, DJ

Kim, HK

Cho, WI

Yoon, YS

机构：

[1] Yonsei Univ, Dept Ceram Engn, Sodaemoon Ku, Seoul 120749, South Korea

[2] Korea Inst Sci & Technol, Thin Film Technol Res Ctr, Seoul 130650, South Korea

[3] Korea Inst Sci & Technol, Battery & Fuel Cell Res Ctr, Seoul 130650, South Korea

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2001年 / 148卷 / 03期

关键词：

D O I：

10.1149/1.1350666

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide (RuO2) thin film electrode and an amorphous LixPOyNz (Lipon) thin film electrolyte. The electrochemical behavior of the RuO2/Lipon/RuO2/Pt TFSC was characterized by a charge-discharge technique in the potential range of 0-2 V. The RuO2/Lipon/RuO2/Pt TFSC exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the RuO2/Lipon/RuO2/Pt TFSC at the first cycle is 38 mF/cm(2) mum. (C) 2001 The Electrochemical Society. All rights reserved.

引用

页码：A275 / A278

页数：4

共 13 条

[1] Superionic solids: composite electrolyte phase - an overview [J].

Agrawal, RC ;

Gupta, RK .

JOURNAL OF MATERIALS SCIENCE, 1999, 34 (06) :1131-1162

[2]

ALCAZAR HBS, 1988, P 33 INT POW SOURC S, P607

[3]

Conway BE, 1999, ELECTROCHEMICAL SUPE, P15

[4] LIFETIME OF ELECTROCHROMISM OF AMORPHOUS WO3-TIO2 THIN-FILMS [J].

HASHIMOTO, S ;

MATSUOKA, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1991, 138 (08) :2403-2408

[5] PROLONGED LIFETIME OF ELECTROCHROMISM OF AMORPHOUS WO3-TIO2 THIN-FILMS [J].

HASHIMOTO, S ;

MATSUOKA, H .

SURFACE AND INTERFACE ANALYSIS, 1992, 19 (1-12) :464-468

[6] Self-discharge and potential recovery phenomena at thermally and electrochemically prepared RuO2 supercapacitor electrodes [J].

Liu, TC ;

Pell, WG ;

Conway, BE .

ELECTROCHIMICA ACTA, 1997, 42 (23-24) :3541-3552

[7] Materials for electrochemical capacitors - Theoretical and experimental constraints [J].

Sarangapani, S ;

Tilak, BV ;

Chen, CP .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1996, 143 (11) :3791-3799

[8] Lithium trapping at excess oxygen in sputter-deposited a-WO3 films [J].

Vink, TJ ;

Boonekamp, EP ;

Verbeek, RGFA ;

Tamminga, Y .

JOURNAL OF APPLIED PHYSICS, 1999, 85 (03) :1540-1544

[9] Influence of interface structure on chemical etching process for air gap of microelectromechanical system based on surface micromachining [J].

Yoon, YS ;

Kim, JH ;

Polla, DL ;

Shin, YH .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1998, 37 (12B) :7129-7133

[10] RuO2/Ru electrode on Si3N4/Si substrate for microelectromechanical systems devices based on Pb(Zr1-xTix)O3 film and surface micromachining [J].

Yoon, YS ;

Kim, JH ;

Schmidt, AM ;

Polla, DL ;

Wang, Q ;

Gladfelter, WL ;

Shin, YH .

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1998, 9 (06) :465-471

← 1 2 →