Characterization of embedded spiral inductors in co-fired ceramic substrates

被引：6

作者：

Chen, LS ^{[1
]}

Hsi, CS

Fu, SL

Lin, JY

机构：

[1] I Shou Univ, Dept Elect Engn, Kaohsiung, Taiwan

[2] I Shou Univ, Dept Mat Sci & Engn, Kaohsiung, Taiwan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2001年 / 40卷 / 01期

关键词：

embedded inductor; ferrite; spiral coil; inductance; quality factor;

D O I：

10.1143/JJAP.40.123

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Embedded planarized inductors can be fabricated using the low-temperature co-fired ceramic technique. Larger inductance is obtained when using a spiral pattern, because the mutual inductance between adjacent conductors has a positive sign. In addition, because of their simple geometry and easy fabrication, spiral-type inductors are widely used. For embedded five- and ten-turn spiral coils, the inductances of about 0.3 and 1.2 muH were obtained, respectively. The value of inductance was almost unchanged in the frequency range between 500 kHz and 40 MHz. The quality factor reaches a peak with increasing frequency and then falls. The peak values (about 10 MHz) of the five- and ten-turn spiral coils are about 20 and 32, respectively.

引用

页码：123 / 127

页数：5

共 17 条

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