共 16 条
[3]
Furuya Y., 1990, ENG ASPECTS SHAPE ME, P338
[4]
HARRISON JD, 1990, ENG ASPECTS SHAPE ME, P106
[5]
HASHIMOTO M, 1985, J ROBOTIC SYST, V2, P3
[7]
HODGSON DE, 1990, ENG ASPECTS SHAPE ME, P362
[8]
Ikuta K., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P103, DOI 10.1109/MEMSYS.1991.114778
[10]
LIN G, 1992, MICROMECH SYST, V40, P171