On the crystalline structure, stoichiometry and band gap of InN thin films

被引:90
作者
Yu, KM [1 ]
Liliental-Weber, Z
Walukiewicz, W
Shan, W
Ager, JW
Li, SX
Jones, RE
Haller, EE
Lu, H
Schaff, WJ
机构
[1] Lawrence Berkeley Natl Lab, Div Mat Sci, Berkeley, CA 94720 USA
[2] Univ Calif Berkeley, Dept Mat Sci & Engn, Berkeley, CA 94720 USA
[3] Cornell Univ, Dept Elect & Comp Engn, Ithaca, NY 14853 USA
关键词
D O I
10.1063/1.1861513
中图分类号
O59 [应用物理学];
学科分类号
摘要
`Detailed transmission electron microscopy, x-ray diffraction (XRD), and optical characterization of a variety of InN thin films grown by molecular-beam epitaxy under both optimized and nonoptimized conditions is reported. Optical characterization by absorption and photoluminescence confirms that the bandgap of single-crystalline and polycrystalline wurtzite InN is 0.70 +/- 0.05 eV. Films grown under optimized conditions with an AlN nucleation layer and a GaN buffer layer are stoichiometric, single-crystalline wurtzite structure with dislocation densities not exceeding mid 10(10) cm (-2). Nonoptimal films can be polycrystalline and display an XRD diffraction feature at 20 approximate to 33; this feature has been attributed by others to the presence of metallic In clusters. Careful indexing of wide-angle XRD scans and selected area diffraction patterns shows that this peak is in fact due to the presence of polycrystalline InN grains; no evidence of metallic In clusters was found in any of the studied samples. (C) 2005 American Institute of Physics.
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页码:1 / 3
页数:3
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