Adhesion enhancement by a dielectric barrier discharge of PDMS used for flexible and stretchable electronics

被引:108
作者
Morent, R. [1 ]
De Geyter, N. [1 ]
Axisa, F. [2 ]
De Smet, N. [3 ]
Gengembre, L.
De Leersnyder, E. [2 ]
Leys, C. [1 ]
Vanfleteren, J. [2 ]
Rymarczyk-Machal, M. [3 ]
Schacht, E. [3 ]
Payen, E. [4 ]
机构
[1] Univ Ghent, Fac Engn, Dept Appl Phys, Res Unit Plasma Technol, Ghent, Belgium
[2] TFCG Microsyst, Dept Eletron & Informat Syst, B-9052 Ghent, Belgium
[3] Univ Ghent, Fac Sci, Dept Organ Chem, Biomat Res Grp, B-9000 Ghent, Belgium
[4] Univ Sci & Technol Lille, CNRS 8181, Unite Catalyse Chim Solide, UMR, F-59655 Villeneuve Dascq, France
关键词
D O I
10.1088/0022-3727/40/23/021
中图分类号
O59 [应用物理学];
学科分类号
摘要
Currently, there is a strong tendency to replace rigid electronic assemblies by mechanically flexible and stretchable equivalents. This emerging technology can be applied for biomedical electronics, such as implantable devices and electronics on skin. In the first step of the production process of stretchable electronics, electronic interconnections and components are encapsulated into a thin layer of polydimethylsiloxane (PDMS). Afterwards, the electronic structures are completely embedded by placing another PDMS layer on top. It is very important that the metals inside the electronic circuit do not leak out in order to obtain a highly biocompatible system. Therefore, an excellent adhesion between the 2 PDMS layers is of great importance. However, PDMS has a very low surface energy, resulting in poor adhesion properties. Therefore, in this paper, PDMS films are plasma treated with a dielectric barrier discharge (DBD) operating in air at medium pressure (5.0 kPa). Contact angle and XPS measurements reveal that plasma treatment increases the hydrophilicity of the PDMS films due to the incorporation of silanol groups at the expense of methyl groups. T-peel tests show that plasma treatment rapidly imparts adhesion enhancement, but only when both PDMS layers are plasma treated. Results also reveal that it is very important to bond the plasma-treated PDMS films immediately after treatment. In this case, an excellent adhesion is maintained several days after treatment. The ageing behaviour of the plasma- treated PDMS films is also studied in detail: contact angle measurements show that the contact angle increases during storage in air and angle-resolved XPS reveals that this hydrophobic recovery is due to the migration of low molar mass PDMS species to the surface.
引用
收藏
页码:7392 / 7401
页数:10
相关论文
共 31 条
[1]   Elastic and conformable electronic circuits and assemblies using MID in polymer [J].
Axisa, F. ;
Brosteaux, D. ;
De Leersnyder, E. ;
Bossuyt, F. ;
Gonzalez, M. ;
Bulcke, M. Vanden ;
Vanfleteren, J. .
6TH INTERNATIONAL IEEE CONFERENCE ON POLYMERS AND ADHESIVES IN MICROELECTRONICS AND PHOTONICS, PROCEEDINGS 2007, 2007, :280-+
[2]   Inhibition of aging in plasma-treated high-density polyethylene [J].
Banik, I ;
Kim, KS ;
Yun, YI ;
Kim, DH ;
Ryu, CM ;
Park, CE .
JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, 2002, 16 (09) :1155-1169
[3]   Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength [J].
Bhattacharya, S ;
Datta, A ;
Berg, JM ;
Gangopadhyay, S .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (03) :590-597
[4]   Using a nitrogen dielectric barrier discharge for surface treatment [J].
Borcia, G ;
Anderson, CA ;
Brown, NMD .
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2005, 14 (02) :259-267
[5]  
BROSTEAUX D, 2006, P MRS SPRING M SAN F
[6]   Design and fabrication of elastic interconnections for stretchable electronic circuits [J].
Brosteaux, Dominique ;
Axisa, Fabrice ;
Gonzalez, Mario ;
Vanfleteren, Jan .
IEEE ELECTRON DEVICE LETTERS, 2007, 28 (07) :552-554
[7]   Treatment of polymer films with a dielectric barrier discharge in air, helium and argon at medium pressure [J].
De Geyter, N. ;
Morent, R. ;
Leys, C. ;
Gengembre, L. ;
Payen, E. .
SURFACE & COATINGS TECHNOLOGY, 2007, 201 (16-17) :7066-7075
[8]   Surface modification of a polyester non-woven with a dielectric barrier discharge in air at medium pressure [J].
De Geyter, N. ;
Morent, R. ;
Leys, C. .
SURFACE & COATINGS TECHNOLOGY, 2006, 201 (06) :2460-2466
[9]   Hydrophobic recovery of plasma-treated polydimethylsiloxane [J].
Fritz, JL ;
Owen, MJ .
JOURNAL OF ADHESION, 1995, 54 (1-2) :33-45
[10]   Hydrophobicity changes in silicone rubbers [J].
Hillborg, H ;
Gedde, UW .
IEEE TRANSACTIONS ON DIELECTRICS AND ELECTRICAL INSULATION, 1999, 6 (05) :703-717