Recent progress in multiphoton microfabrication

被引：334

作者：

Maruo, Shoji ^{[1
,2
]}

Fourkas, John T. ^{[3
,4
,5
,6
]}

机构：

[1] Yokohama Natl Univ, Dept Mech Engn, Hodogaya Ku, Yokohama, Kanagawa 2408501, Japan

[2] Japan Sci & Technol Agcy, PRESTO, Chiyoda Ku, Tokyo 1020075, Japan

[3] Univ Maryland, Dept Chem & Biochem, College Pk, MD 20742 USA

[4] Univ Maryland, Inst Phys Sci & Technol, College Pk, MD 20742 USA

[5] Univ Maryland, Maryland NanoCtr, College Pk, MD 20742 USA

[6] Univ Maryland, Ctr Nanophys & Adv Mat, College Pk, MD 20742 USA

来源：

LASER & PHOTONICS REVIEWS | 2008年 / 2卷 / 1-2期

关键词：

microfabrication; nanofabrication; two-photon absorption; photopolymerization; photonic crystals;

D O I：

10.1002/lpor.200710039

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Multiphoton microfabrication enables the production of three-dimensional microstructures with sub- 100 nm resolution via direct laser writing using a ferntosecond, pulsed laser beam. The range of materials available for multiphoton processing has increased steadily over the past decade, and the extent of potential applications has increased correspondingly. Current application areas include photonics, microelectromechanical systems, and microelectronics. We review the fundamentals of multiphoton microfabrication and recent progress on materials and applications. Approaches for the mass production of three-dimensional structures created with multiphoton fabrication are also discussed.

引用

页码：100 / 111

页数：12

共 104 条

[1]

[Anonymous], J MICROMECH SYST

[2]

[Anonymous], MICROSTEREOLITHOGRAP

[3] Multiphoton laser direct writing of two-dimensional silver structures [J].