Vacuum properties of a new panel structure for field emission displays

被引:5
作者
Cho, YR
Kim, HS
Mun, JD
Oh, JY
Jeong, HS
Ahn, S
机构
[1] Inst Adv Engn, Elect Mat Lab, Kyonggi Do 449020, South Korea
[2] Ajou Univ, Flat Panel Display Ctr, Kyonggi Do 442749, South Korea
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1998年 / 16卷 / 06期
关键词
D O I
10.1116/1.590344
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A new field emission display (FED) panel structure with an auxiliary space was developed in order to increase the conductance of the system for evacuation and help evacuate the cavity inside the FED more effectively. Gas molecules in the main space of the panel can move easily into the auxiliary space through the multiple openings in the base plate and can then be pumped out through the exhaust tube at the auxiliary tank. For the very thin panel, in which the space between the face plate and base plate is 58 mu m, pressure drop characteristics during evacuation are very sensitive to the number of openings in the base plate. The main purpose of multiple openings in shortening evacuation time is to reduce pressure gradient inside the cavity. Additionally, the auxiliary space makes it easy to place various getters inside the FED panel and to maintain high vacuum for a prolonged lifetime of the FED. (C) 1998 American Vacuum Society. [S0734-211X(98)00406-5].
引用
收藏
页码:3069 / 3072
页数:4
相关论文
共 11 条
[1]  
BANNO Y, Patent No. 5525861
[2]  
Cho YR, 1997, IVMC'97 - 1997 10TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, P271
[3]  
GNADE B, 1995, SEM LECT NOT M8 SID
[4]  
JEONG HS, Patent No. 5729086
[5]  
NAKAYAMA A, Patent No. 0455162A2
[6]  
PALEVSKY A, Patent No. 5543691
[7]  
ROTH A, 1978, VACUUM TECHNOLOGY
[8]  
SCHWOEBEL PR, 1994, VAC MICR ENG DAV 19
[9]   INSITU PUMPING WITH NEG (NON-EVAPORABLE GETTERS) DURING VACUUM PROCESSING [J].
SCIUCCATI, F ;
FERRARIO, B ;
GASPARINI, G ;
ROSAI, L .
VACUUM, 1988, 38 (8-10) :765-769
[10]   FIELD-EMITTER ARRAYS FOR VACUUM MICROELECTRONICS [J].
SPINDT, CA ;
HOLLAND, CE ;
ROSENGREEN, A ;
BRODIE, I .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (10) :2355-2363