Origins and evolution of stress development in sol-gel derived thin layers and multideposited coatings of lead titanate

被引:94
作者
Sengupta, SS [1 ]
Park, SM
Payne, DA
Allen, LH
机构
[1] Univ Illinois, Seitz Mat Res Lab, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Beckman Inst, Urbana, IL 61801 USA
[3] Hankuk Aviation Univ, Dept Mat Engn, Kyonggi Do, South Korea
关键词
D O I
10.1063/1.366971
中图分类号
O59 [应用物理学];
学科分类号
摘要
Stress development in thin layers of lead titanate prepared by sol-gel processing was monitored by in situ laser reflectance measurements. Layers were spin coated onto silicon substrates and thermally cycled to 500 degrees C. The shrinkage normal to the rigid substrate was determined by in situ ellipsometry. Changes that occurred on drying and firing, which related to densification and stress development, are reported. The observed changes were explained in terms of evaporation and solvent/polymeric network interactions at lower temperatures, and thermal expansion mismatch between the substrate and the coating after formation of the dense oxide. Crystallization into the perovskite structure occurred only in thicker or multideposited coatings, altering the state of stress from tensile, to progressively more compressive, on cooling. The importance of the choice of substrate material, deposition method and heat treatment conditions, in relation to stress development and dependent electrical properties, are discussed. (C) 1998 American Institute of Physics.
引用
收藏
页码:2291 / 2296
页数:6
相关论文
共 29 条
[1]  
BOGGS KE, 1994, P SOC PHOTO-OPT INS, V2256, P350, DOI 10.1109/ICMCM.1994.753574
[2]   SOL-]GEL-]GLASS .2. PHYSICAL AND STRUCTURAL EVOLUTION DURING CONSTANT HEATING RATE EXPERIMENTS [J].
BRINKER, CJ ;
SCHERER, GW ;
ROTH, EP .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 72 (2-3) :345-368
[3]  
BRINKER CJ, 1990, SOL GEL SCI, pCH8
[4]  
Budd K. D., 1985, British Ceramic Proceedings, P107
[5]   RAMAN-SPECTROSCOPY AND X-RAY-DIFFRACTION OF PBTIO3 THIN-FILM [J].
CHINGPRADO, E ;
REYNESFIGUEROA, A ;
KATIYAR, RS ;
MAJUMDER, SB ;
AGRAWAL, DC .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (03) :1920-1925
[6]   STRESS-INDUCED MODIFICATIONS IN FERROELECTRIC-FILMS [J].
DESU, SB .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1994, 141 (01) :119-133
[7]   THIN-FILM FERROELECTRICS OF PZT BY SOL-GEL PROCESSING [J].
DEY, SK ;
BUDD, KD ;
PAYNE, DA .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1988, 35 (01) :80-81
[8]   SPECTROSCOPIC MEASUREMENTS OF STRESS-RELAXATION DURING THERMALLY INDUCED CRYSTALLIZATION OF AMORPHOUS TITANIA FILMS [J].
EXARHOS, GJ ;
HESS, NJ .
THIN SOLID FILMS, 1992, 220 (1-2) :254-260
[9]   EFFECTS OF H2O ON STRUCTURE OF ACID-CATALYZED SIO2 SOL-GEL FILMS [J].
FARDAD, MA ;
YEATMAN, EM ;
DAWNAY, EJC ;
GREEN, M ;
HOROWITZ, F .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1995, 183 (03) :260-267
[10]  
Garino TJ., 1991, MATER RES SOC S P, DOI 10.1557/proc-243-341