Flat electromagnetic pressure sensor for harsh environments

被引：2

作者：

Dutoit, BM ^{[1
]}

Pilloud, Y ^{[1
]}

Elegibili, F ^{[1
]}

Besse, PA ^{[1
]}

Popovic, RS ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, Inst Microsyst, EPFL, CH-1015 Lausanne, Switzerland

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 91卷 / 1-2期

关键词：

pressure sensor; electromagnetic; force compensation; eddy current; harsh environment; feed-back;

D O I：

10.1016/S0924-4247(01)00508-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A flat force-balanced electromagnetic pressure sensor for harsh environments has been designed and tested from -140 to +140 mbar. It uses corrosion resistant stainless steel membranes without oil filling. It has been designed to have a current consumption smaller than 16 mA, to respect the industrial current loop standard. It has a Linearity of +/-1.5% and a cutoff frequency of 3.8 kHz. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：51 / 56

页数：6