High-throughput method for the impedance spectroscopic characterization of resistive gas sensors

被引：33

作者：

Frantzen, A

Scheidtmann, J

Frenzer, G

Maier, WE

Jockel, J

Brinz, T

Sanders, D

Simon, U

机构：

[1] Univ Saarland, D-66041 Saarbrucken, Germany

[2] Rhein Westfal TH Aachen, D-52056 Aachen, Germany

来源：

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION | 2004年 / 43卷 / 06期

关键词：

D O I：

10.1002/anie.200352424

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

A combinatorial work flow for the rapid synthesis and testing of thick oxide films for the development of new gas sensors with improved sensitivity and selectivity involves the synthesis and deposition of mixed-oxide films of variable composition. The library is based on the sol-gel synthesis of mixed oxides on an array of 8 × 8 interdigitated electrodes. For the characterization of the sensor arrays, test gas sequences and sensor temperatures were varied.

引用

页码：752 / 754

页数：3

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