Improved spatial phase detection for profilometry using a TDI imager

被引：25

作者：

Sajan, MR ^{[1
]}

Tay, CJ

Shang, HM

Asundi, A

机构：

[1] Natl Univ Singapore, Dept Mech & Prod Engn, Singapore 119260, Singapore

[2] Nanyang Technol Univ, Sch Mech & Prod Engn, Singapore 639798, Singapore

来源：

OPTICS COMMUNICATIONS | 1998年 / 150卷 / 1-6期

关键词：

Moire; optical inspection; profilometry; digital imaging; dynamic imaging; TDI;

D O I：

10.1016/S0030-4018(97)00736-0

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Performance of a time delay and integration (TDI) imager is analogous to a drum/periphery camera. Coupled to a modulated line generating laser diode, it is possible to use a TDI imager to encode the shape profile of a rotating cylindrical object as deformed gratings in a digital image. Among the various methods for extracting the phase from a deformed grating, the spatial phase detection (SPD) method is fast and easy to use. Errors are introduced in this method if the phase gradient is high over a grating interval. Were we propose a method to reduce the phase gradient by using a TDI feature which makes it possible to record images at variable lateral magnification. (C) 1998 Published by Elsevier Science B.V. All rights reserved.

引用

页码：66 / 70

页数：5

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