Interaction of atomic hydrogen with Zn-polar and O-polar ZnO surfaces

被引：40

作者：

Losurdo, M

Giangregorio, MM

机构：

[1] CNR, Inst Inorgan Methodol & Plasmas, I-70126 Bari, Italy

[2] INSTM, Sec Bari, I-70126 Bari, Italy

来源：

APPLIED PHYSICS LETTERS | 2005年 / 86卷 / 09期

关键词：

D O I：

10.1063/1.1870103

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The interaction of Zn-polar and O-polar ZnO surfaces with atomic hydrogen produced by a remote rf plasma source is investigated in situ and in real time using spectroscopic ellipsometry. It is found that the reactivity of ZnO with atomic hydrogen depends on polarity. The interaction of O-polar surfaces with atomic hydrogen at 100 C is suitable for producing clean surfaces, while Zn-polar surfaces strongly react with atomic hydrogen resulting in a disruption of the ZnO lattice with formation of Zn surface clusters. (C) 2005 American Institute of Physics.

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页码：1 / 3

页数：3

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