Fabrication of a miniature thermoelectric module with elements composed of sintered Bi-Te compounds

被引:14
作者
Kishi, M [1 ]
Yoshida, Y [1 ]
Okano, H [1 ]
Nemoto, H [1 ]
Funanami, Y [1 ]
Yamamoto, M [1 ]
Kanazawa, H [1 ]
机构
[1] Seiko Instruments Inc, Matsudo, Chiba 271, Japan
来源
PROCEEDINGS ICT'97 - XVI INTERNATIONAL CONFERENCE ON THERMOELECTRICS | 1997年
关键词
D O I
10.1109/ICT.1997.667614
中图分类号
O414.1 [热力学];
学科分类号
摘要
A new manufacturing process of pi-shaped miniature thermoelectric module composed of sintered Bi-Te compounds has been developed. The manufacturing process is suitable for mass production as it is comprised of simple technologies such as conventional photolithography technology, micro-bonding technology using the solder bump method and precise cutting technology using a dicing machine. A miniature module with the dimensions of 3 mm X 3 mm X 1.3 mm in which 102 elements (51 junctions) with the dimensions of 120 mu m X 120 mu m incross section parallel to the substrates and a height of 600 mu m were included was fabricated while developing the process. The maximum temperature difference Delta Tmax, and the heat absorption Q(max) of the module were 61.3 degrees C and 0.36W, respectively. This indicates that the performance of the module asa cooling device was equivalent to that of conventional modules. The specification for high voltage and low current input, a significant purpose in addition to the miniaturization of the module, was achieved because the maximum voltage V-max and current I-max were 6.7 V and 110 mA, respectively.
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页码:653 / 656
页数:4
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