Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators

被引：40

作者：

Serre, Christophe ^{[1
]}

Perez-Rodriguez, Alejandro ^{[1
]}

Fondevilla, Nuria ^{[1
]}

Morante, Joan Ramon ^{[1
]}

Montserrat, Josep ^{[1
,2
]}

Esteve, Jaume ^{[2
]}

机构：

[1] Univ Barcelona, Dept Elect, E-08028 Barcelona, Spain

[2] Ctr Nacl Microelect CNM CSIC, Bellaterra, Spain

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2007年 / 13卷 / 11-12期

关键词：

D O I：

10.1007/s00542-006-0338-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this work, we present the design and optimization of an electromagnetic inertial microgenerator for energy scavenging applications, compatible with Si technology. It consists of a fixed micromachined coil and a movable magnet (inertial mass) mounted on a resonant structure (Kapton(R) membrane). The modeling of the device, based on a velocity damped resonator, has allowed to make a quantitative analysis of the capabilities of this simple device structure for the development of power generators for autonomous microsystem applications. The characterization of a first (not optimized) prototype has allowed the validation of the model, which is then used as a roadmap for a number of optimizations for the final device design. For this design, the model developed shows the possibility to achieve power levels up to hundreds of mu W's, with voltage levels compatible with the requirements of standard rectifying circuits.

引用

页码：1655 / 1661

页数：7

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