Barium titanate epoxy composite dielectric materials for integrated thin film capacitors

被引:54
作者
Liang, SR [1 ]
Chong, SR [1 ]
Giannelis, EP [1 ]
机构
[1] Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
来源
48TH ELECTRONIC COMPONENTS & TECHNOLOGY CONFERENCE - 1998 PROCEEDINGS | 1998年
关键词
D O I
10.1109/ECTC.1998.678688
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Integration of passive components into electronic packaging will lead to further structural miniaturization, performance aid reliability improvements, as well as cost reduction in the microelectronics industry. To replace the discrete capacitors currently employed in packages with the embedded ones, suitable dielectric materials and thin film processes compatible with the PWB technology are desired. Toward this end we have been investigating a thin film technology based on barium titanate (BaTiO3)/epoxy composites, whose advantages in terms of processability, low processing temperature, and versatility make it quite promising. In this process, the homogeneous dispersion of fine-grained barium titanate into the epoxy matrix was achieved through the surface functionalization of the ceramic powders with a silane coupling agent. Particulate coatings were formulated using the functionalized barium titanate powders, bisphenol A epoxy resin, dicyandiamide, and 2-methylimidazole in an organic solvent. The composite dielectric thin layers were processed on Cu substrates by spinor dip-coating followed by curing at 175 degrees C. Electrical measurements on these capacitors demonstrate that, for composite dielectric films containing 60 vol% of barium titanate, a dielectric constant of about 40 at 1 kHz and low loss factors of less than 0.035 over a wide frequency region have been obtained. The crosslinking reaction in this hybrid system was investigated using IR spectroscopy. The curing reaction of the epoxy is not inhibited by the presence of BaTiO3 particles, but instead, it seems to proceed even faster.
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页码:171 / 175
页数:5
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