A novel fabrication method for a 64x64 matrix-addressable GaN-based micro-LED array

被引：12

作者：

Jeon, CW ^{[1
]}

Choi, HW ^{[1
]}

Dawson, MD ^{[1
]}

机构：

[1] Univ Strathclyde, Wolfson Ctr, Inst Photon, Glasgow G4 0NW, Lanark, Scotland

来源：

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2003年 / 200卷 / 01期

关键词：

D O I：

10.1002/pssa.200303292

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The fabrication and performance of GaN-based micro-light emitting diode (p-LED) arrays with 64 x 64 elements is reported. The diameter of each element is 20 pm and center-to-center spacing 30 pm, giving an overall active area of the arrays of 80425 pm. Through a novel fabrication approach including a isotropic dry etching and a self-aligned isolation technique, we could easily obtain an interconnection for a matrix-addressable array device. The arrays emit >50 muW per element at 3 mA drive current. Adopting a spreading metal as a p-contact, the turn-on voltage was lowered down to 3.4 V. (C) 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

引用

页码：79 / 82

页数：4

共 8 条

[1] Micromosaic immunoassays [J].

Bernard, A ;

Michel, B ;

Delamarche, E .

ANALYTICAL CHEMISTRY, 2001, 73 (01) :8-12

[2] Mechanism of enhanced light output efficiency in InGaN-based microlight emitting diodes [J].

Choi, HW ;

Jeon, CW ;

Dawson, MD ;

Edwards, PR ;

Martin, RW ;

Tripathy, S .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (10) :5978-5982

[3] Internal labeling of oligonucleotide probes by Diels-Alder cycloaddition [J].

Graham, D ;

Grondin, A ;

McHugh, C ;

Fruk, L ;

Smith, WE .

TETRAHEDRON LETTERS, 2002, 43 (27) :4785-4788

[4]

Jeon CW, 2002, PHYS STATUS SOLIDI A, V192, P325, DOI 10.1002/1521-396X(200208)192:2<325::AID-PSSA325>3.0.CO

[5]

2-Q

[6]

Ozden I, 2001, PHYS STATUS SOLIDI A, V188, P139, DOI 10.1002/1521-396X(200111)188:1<139::AID-PSSA139>3.0.CO

[7]

2-H

[8] Inductively coupled plasma-induced etch damage of GaN p-n junctions [J].

Shul, RJ ;

Zhang, L ;

Baca, AG ;

Willison, CG ;

Han, J ;

Pearton, SJ ;

Ren, F .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (04) :1139-1143

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