Fabrication and characterization of a micro turbine/bearing rig

被引：17

作者：

Lin, CC ^{[1
]}

Ghodssi, R ^{[1
]}

Ayon, AA ^{[1
]}

Chen, DZ ^{[1
]}

Jacobson, S ^{[1
]}

Breuer, K ^{[1
]}

Epstein, AH ^{[1
]}

Schmidt, MA ^{[1
]}

机构：

[1] MIT, Microsyst Technol Labs, Cambridge, MA 02139 USA

来源：

MEMS '99: TWELFTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 1999年

关键词：

D O I：

10.1109/MEMSYS.1999.746884

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper reports on a process to build, package, and instrument a 5-level wafer-bonded micro-machined turbine/bearing rig. The process flow involves the use of 5 wafers, 16 masks, and 9 deep silicon etching steps, as well as utilizing aligned wafer bonding, double-sided deep reactive ion etching (DRIE), and Laser-Assisted-Etching (LAE). This paper also shows experimental results on flow characteristics of the hydrostatic thrust bearings and the preliminary rotational performance of the device.

引用

页码：529 / 533

页数：5