Tribology of MEMS

被引：131

作者：

de Boer, MP

Mayer, TM

机构：

[1] Sandia Natl Labs, Surface Micromachining Dept, Tech Staff, Albuquerque, NM 87185 USA

[2] Sandia Natl Labs, Surface & Interface Sci Dept, Tech Staff, Albuquerque, NM 87185 USA

来源：

MRS BULLETIN | 2001年 / 26卷 / 04期

关键词：

D O I：

10.1557/mrs2001.65

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：302 / 304

页数：3

共 31 条

[1]

ASHURST WR, 2000, P SOL STAT SENS ACT, P320

[2] Relationship between friction and molecular structure: Alkylsilane lubricant films under pressure [J].

Barrena, E ;

Kopta, S ;

Ogletree, DF ;

Charych, DH ;

Salmeron, M .

PHYSICAL REVIEW LETTERS, 1999, 82 (14) :2880-2883

[3] The impact of solution agglomeration on the deposition of self-assembled monolayers [J].

Bunker, BC ;

Carpick, RW ;

Assink, RA ;

Thomas, ML ;

Hankins, MG ;

Voigt, JA ;

Sipola, D ;

de Boer, MP ;

Gulley, GL .

LANGMUIR, 2000, 16 (20) :7742-7751

[4] Scratching the surface: Fundamental investigations of tribology with atomic force microscopy [J].

Carpick, RW ;

Salmeron, M .

CHEMICAL REVIEWS, 1997, 97 (04) :1163-1194

[5]

Crozier BT, 2000, MATER RES SOC SYMP P, V605, P129

[6] Adhesion of polysilicon microbeams in controlled humidity ambients [J].

de Boer, MP ;

Clews, PJ ;

Smith, BK ;

Michalske, TA .

MICROELECTROMECHANICAL STRUCTURES FOR MATERIALS RESEARCH, 1998, 518 :131-136

[7] Adhesion hysteresis of silane coated microcantilevers [J].

De Boer, MP ;

Knapp, JA ;

Michalske, TA ;

Srinivasan, U ;

Maboudian, R .

ACTA MATERIALIA, 2000, 48 (18-19) :4531-4541

[8] Accurate method for determining adhesion of cantilever beams [J].

de Boer, MP ;

Michalske, TA .

JOURNAL OF APPLIED PHYSICS, 1999, 86 (02) :817-827

[9] A hinged-pad test structure for sliding friction measurement in micromachining [J].

de Boer, MP ;

Redmond, JM ;

Michalske, TA .

MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING, 1998, 3512 :241-250

[10]

DEBOER MP, 2001, IN PRESS ASTM STP, V1413

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