Calibrating ESCA and ellipsometry measurements of perfluoropolyether lubricant thickness

被引：80

作者：

Toney, MF ^{[1
]}

Mate, CM

Pocker, D

机构：

[1] IBM Corp, Div Res, Almaden Res Ctr, San Jose, CA 95120 USA

[2] IBM Corp, Storage Syst Div, San Jose, CA 95193 USA

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1998年 / 34卷 / 04期

关键词：

D O I：

10.1109/20.706702

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

X-ray reflectivity (XRR) has been used as an absolute measurement of the thickness of perfluoropolyether (PFPE) lubricant layers on silicon substrates to determine the validity of thickness measurements by electron spectroscopy for chemical analysis (ESCA) and ellipsometry. Excellent agreement is found between these three methods, provided that a 25 Angstrom escape depth for the PFPE film is used in ESCA and the bulk refractive index of the PFPE is used in ellipsometry. It is also essential to properly account for adventitiously adsorbed hydrocarbons.

引用

页码：1774 / 1776

页数：3

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