Thin-film chemical sensors with waveguide Zeeman interferometry

被引：7

作者：

Ayras, P ^{[1
]}

Honkanen, S

Grace, KM

Shrouf, K

Katila, P

Leppihalme, M

Tervonen, A

Yang, X

Swanson, B

Peyghambarian, N

机构：

[1] Univ Arizona, Ctr Opt Sci, Tucson, AZ 85721 USA

[2] Univ Calif Los Alamos Natl Lab, Los Alamos, NM 87545 USA

[3] VTT Elect, FIN-02044 VTT, Finland

[4] Nokia Res Ctr, FIN-00211 Helsinki, Finland

来源：

PURE AND APPLIED OPTICS | 1998年 / 7卷 / 06期

关键词：

D O I：

10.1088/0963-9659/7/6/006

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a highly sensitive chemical sensor scheme using a Si3N4 channel waveguide with a selective surface coating based on polarimetric Zeeman interferometry. The sensing is based on measurement of the phase difference between TE and TM modes propagating in the anisotropic waveguide structure under exposure to toluene vapour. A real-time and reversible response at low ppm level is observed. Modelling results of the sensor structure to further increase its sensitivity are presented.

引用

页码：1261 / 1271

页数：11

共 15 条

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